RF power absorption by plasma of a low-pressure inductive discharge

Author: Kralkina E A   Rukhadze A A   Pavlov V B   Vavilin K V   Nekliudova P A   Petrov A K   Alexandrov A F  

Publisher: IOP Publishing

E-ISSN: 1361-6595|25|1|15016-15027

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 15016-15027

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Abstract