Analysis of retaining ring using finite element simulation in chemical mechanical polishing process

Author: Lo Ship-Peng   Lin Yeou-Yih   Huang Jen-Ching  

Publisher: Springer Publishing Company

ISSN: 0268-3768

Source: The International Journal of Advanced Manufacturing Technology, Vol.34, Iss.5-6, 2007-09, pp. : 547-555

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