Molecular dynamics simulations of clusters and thin film growth in the context of plasma sputtering deposition

Author: Xie Lu   Bauchire Jean-Marc   Thomann Anne-Lise   Bedra Larbi   Brault Pascal  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.22, 2014-06, pp. : 224004-224020

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next