Effect of glow DBD modulation on gas and thin film chemical composition: case of Ar/SiH4/NH3 mixture

Author： Vallade Julien   Bazinette Remy   Gaudy Laura   Massines Françoise  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.22, 2014-06, pp. : 224006-224015

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