Improved reconstruction of critical dimensions in extreme ultraviolet scatterometry by modeling systematic errors

Author： Henn Mark-Alexander   Gross Hermann   Heidenreich Sebastian   Scholze Frank   Elster Clemens   Bär Markus  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.4, 2014-04, pp. : 44003-44011

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