Piezoresistive cantilever working in a shear force mode for in situ characterization of exposed micro- and nanostructures

Author： Sierakowski Andrzej   Kopiec Daniel   Janus Paweł   Ekwińska Magdalena   Płuska Mariusz   Grabiec Piotr   Gotszalk Teodor  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.4, 2014-04, pp. : 44018-44026

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