Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

Author: Llobet J   Sansa M   Gerbolés M   Mestres N   Arbiol J   Borrisé X   Pérez-Murano F  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.13, 2014-04, pp. : 135302-135310

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