Silicon nano-mechanical resonators fabricated by using tip-based nanofabrication

Author: Hu Huan   Cho Hanna   Somnath Suhas   Vakakis Alexander F   King William P  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.27, 2014-07, pp. : 275301-275307

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