A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches

Author: Toler Benjamin F   Coutu Ronald A   McBride John W  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.10, 2013-10, pp. : 103001-103016

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