Optimization of nanofountain probe microfabrication enables large-scale nanopatterning

Author： Safi Asmahan   Kang Wonmo   Czapleski David   Divan Ralu   Moldovan Nicolae   Espinosa Horacio D  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125014-125023

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