Force measurements of a magnetic micro actuator proposed for a microvalve array

Author： Chang Pauline J   Chang Frank W   Yuen Michelle C   Otillar Robert   Horsley David A  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 34005-34011

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