Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications

Author: Agnus Joël   Clévy Cédric   Lutz Philippe   Komati Bilal  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35018-35029

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