Author: Lu Guo-Shin You Po-Chin Lin Kai-Lun Hong Chien-Chong Liou Tong-Miin
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.5, 2014-05, pp. : 55008-55015
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