Two-dimensional optical scanner with monolithically integrated glass microlens

Author： Yoo Sunghyun   Jin Joo-Young   Ha Joon-Geun   Ji Chang-Hyeon   Kim Yong-Kweon  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.5, 2014-05, pp. : 55009-55016

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