A self-packaged two-dimensional thermal wind sensor based on thermopiles for low cost applications

Author： Zhu Y-Q Chen B Gu F Qin M Huang Q-A

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75008-75019

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