Author: Tang Shih-Hao Chiang Hung-Wei Hsieh Min-Chien Chang Yen-Di Yeh Po-Fan Shieh Wung-Yang Tsai Jui-che
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75016-75024
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