Design, fabrication and characterization of infrared LVOFs for measuring gas composition

Author： Ghaderi M Ayerden N P Emadi A Enoksson P Correia J H de Graaf G Wolffenbuttel R F

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.8, 2014-08, pp. : 84001-84008

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