Spectroscopic studies of conventional and active screen N₂–H₂ plasma nitriding processes with admixtures of CH₄ or CO₂

Author： Hamann S Börner K Burlacov I Hübner M Spies H-J Röpcke J

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.5, 2013-10, pp. : 55022-55033

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