Spectroscopic study of H2 microwave plasmas with small admixtures of CH4 and B2H6 used for doped diamond deposition

Author: Hamann S   Rond C   Pipa A V   Wartel M   Lombardi G   Gicquel A   Röpcke J  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.23, Iss.4, 2014-08, pp. : 45015-45025

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