Residual compressive stress and intensity of infrared absorption of cubic BN films prepared by plasma enhanced chemical vapor deposition

Author： Hang-Sheng Yang   Pan-Pan Jin   Ya-Bo Xu   Hai-Yang Li  

Publisher： IOP Publishing

ISSN： 1674-1056

Source： Chinese Physics B, Vol.23, Iss.3, 2014-03, pp. : 37201-37207

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