Low on-resistance high-voltage lateral double-diffused metal oxide semiconductor with a buried improved super-junction layer

Author: Wei Wu   Bo Zhang   Xiao-Rong Luo   Jian Fang   Zhao-Ji Li  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.23, Iss.3, 2014-03, pp. : 38503-38507

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