Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

Author: Lin Zhang   Guo-Jia Ma   Guo-Qiang Lin   He Ma   Ke-Chang Han  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.23, Iss.4, 2014-04, pp. : 48102-48107

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