Sputtering pressure influence on growth morphology, surface roughness, and electrical resistivity for strong anisotropy beryllium film

Author: Bing-Chi Luo   Kai Li   Xiao-Li Kang   Ji-Qiang Zhang   Yu-Dan He   Jiang-Shan Luo   Wei-Dong Wu   Yong-Jian Tang  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.23, Iss.6, 2014-06, pp. : 66804-66808

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