An improved shape shifting method of critical area extraction

Author: Jiaojiao Zhu   Xiaohua Luo   Lisheng Chen   Yi Ye   Xiaolang Yan  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.35, Iss.2, 2014-02, pp. : 26006-26013

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