The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology

Author: Juanting Zhang   Changde He   Hui Zhang   Yuping Li   Yongping Zhang   Chunhui Du   Wendong Zhang  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.35, Iss.6, 2014-06, pp. : 64012-64021

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