Development of a novel accelerometer based on an overlay detection bridge

Author: Chunhui Du   Changde He   Xiaoyang Ge   Yongping Zhang   Jiaqi Yu   Xiaopeng Song   Wendong Zhang  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.34, Iss.2, 2013-02, pp. : 24006-24013

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Abstract