Thickness Determination of Ultra-Thin Films on Si Substrates by EPMA

Author： Campos Christiani S.   Vasconcellos Marcos A. Z.   Llovet Xavier   Salvat Francesc  

Publisher： Springer Publishing Company

ISSN： 0026-3672

Source： Microchimica Acta, Vol.145, Iss.1-4, 2004-04, pp. : 13-17

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