Electrical characterization of micromachined AlN resonators at various back pressures

Author： Ababneh Abdallah Al-Omari A. Dagamseh A. Qiu H. Feili D. Ruiz-Díez V. Manzaneque T. Hernando J. Sánchez-Rojas J. Bittner A. Schmid U. Seidel H.

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 663-670

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