Compact optical position feedback scheme for MOEMS mirrors

Author： Tortschanoff Andreas   Baumgart M.   Holzmann D.   Lenzhofer M.   Sandner T.   Kenda A.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 743-749

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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