Author： Yang H. Pan C.-T. Shen S.-C.
Publisher： Springer Publishing Company
ISSN： 0946-7076
Source： Microsystem Technologies, Vol.10, Iss.2, 2004-01, pp. : 155-160
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
Aligning parts for micro assemblies
By Moll Mark Goldberg Ken Erdmann Michael A Fearing Ron
Assembly Automation, Vol. 22, Iss. 1, 2002-02 ,pp. :
Access to resources
Recommend
A Planar Micro Spark Gap Switch with a Triggering Electrode
Micro and Nanosystems, Vol. 3, Iss. 4, 2011-12 ,pp. :
Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers
By Bouyge D. Crunteanu A. Sabourdy D. Blondy P. Couderc V. Lhermite J. Grossard L. Barthélemy A.
Microsystem Technologies, Vol. 13, Iss. 11-12, 2007-07 ,pp. :
Solving functional reliability issue for an optical electrostatic switch
By Camon H.
Microsystem Technologies, Vol. 14, Iss. 7, 2008-07 ,pp. :