Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement

Author： Frank Thomas   Doering L.   Heinrich G.   Thronicke N.   Löbner C.   Völlmeke St.   Steinke A.   Reich S.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 927-931

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