Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon

Author： Biehl Saskia   Rumposch Christian   Bräuer Günter   Hoffmeister Hans-Werner   Luig Martin  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 989-993

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