Characterization of Al2O3 thin films fabricated through atomic layer deposition on polymeric substrates

Author: Ali Kamran   Kim Chang   Choi Kyung-Hyun  

Publisher: Springer Publishing Company

ISSN: 0957-4522

Source: Journal of Materials Science: Materials in Electronics, Vol.25, Iss.4, 2014-04, pp. : 1922-1932

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