Atomic structure of AlN/Al2O3 interfaces fabricated by pulsed-laser deposition

Author: Tokumoto Y.   Sato Y.   Yamamoto T.   Shibata N.   Ikuhara Y.  

Publisher: Springer Publishing Company

ISSN: 0022-2461

Source: Journal of Materials Science, Vol.41, Iss.9, 2006-05, pp. : 2553-2557

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