Non-contact C-V measurements of ultra thin dielectrics

Author: Edelman P.   Savtchouk A.   Wilson M.   D'Amico J.   Kochey J. N.   Marinskiy D.   Lagowski J.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|27|1-3|495-498

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 495-498

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Abstract