Scanning kelvin-probe characterization of heavy metal contamination in patterned SIMOX wafers

Author： Nakamura S.   Ikeda H.   Watanabe D.   Suhara M.   Okumura T.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|27|1-3|491-493

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 491-493

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