Temperature measurements by optical pyrometry during the epitaxial growth ofsemiconductors

Author: Lévêque G.   Nouaoura M.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|4|2|227-233

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.4, Iss.2, 2010-03, pp. : 227-233

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Abstract