Room-temperature diffusion of evaporated Fe atom into SOI materials characterized by scanning Kelvin-SPV method

Author： Nakamura S.   Ikeda H.   Watanabe D.   Suhara M.   Okumura T.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|27|1-3|487-489

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 487-489

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