Amorphous to crystalline induced CoSi2 phase formation in Co-implanted Si

Author: Abhaya S.   Amarendra G.   Kalavathi S.   Panigrahi B. K.   Saroja S.   Nair K. G. M.   Sastry V. S.   Sundar C. S.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|41|2|107-110

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.41, Iss.2, 2008-02, pp. : 107-110

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