Evolution of He-induced cavities and related defects in silicon studied by direct scattering of channeled particles

Author: Grob A.   Grob J. J.   Roqueta F.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|23|1|19-23

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.23, Iss.1, 2002-11, pp. : 19-23

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Abstract