Impedance matching for optimization of power transfer in a capacitively excited RF plasma reactor

Author： Mohamed Salem M.   Loiseau J.-F.   Held B.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|3|1|91-95

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.3, Iss.1, 2010-03, pp. : 91-95

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

A technique for evaluating the RF voltage across the electrodes of a capacitively-coupled plasma reactor

By Lisovskiy V.   Booth J.-P.   Landry K.   Douai D.   Cassagne V.   Yegorenkov V.  

EPJ Applied Physics (The), Vol. 36, Iss. 2, 2006-10 ,pp. : 177-182

Edp Sciences

Access to resources Recommend Favorite

Assessment of quasi-linear effect of RF power spectrum for enabling lower hybrid current drive in reactor plasmas

By Cesario Roberto  

EPJ Web of Conference, Vol. 157, Iss. issue, 2017-10 ,pp. : 03007-03007

Edp Sciences

Access to resources Recommend Favorite

A consideration of impedance matching issues with metamaterials

By Pope Simon A.   Pelgrinis Michael   Daley Steve  

INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol. 2011, Iss. 8, 2011-07 ,pp. : 53-61

Institute of Noise Control Engineering

Access to resources Recommend Favorite

Simulation and Optimization of Contactless Power Transfer System for Rotary Ultrasonic Machining

By  

MATEC Web of conference, Vol. 68, Iss. issue, 2016-08 ,pp. : 12001-12001

Edp Sciences

Access to resources Recommend Favorite

Particulate growth in a 13.56 MHz radiofrequency methane plasma: influence of the flow rate and the incident rf power

By Géraud-Grenier I.   Massereau-Guilbaud V.   Plain A.  

EPJ Applied Physics (The), Vol. 14, Iss. 3, 2010-03 ,pp. : 187-192

Edp Sciences

Access to resources Recommend Favorite