Study of bulk micromachining for 〈100〉 silicon

Author: Zandi K.   Arzi E.   Izadi N.   Mohajerzadeh S.   Haji S.   Abdi Y.   Asl Soleimani E.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|35|1|7-12

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.35, Iss.1, 2006-07, pp. : 7-12

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Abstract