Non-initial overlap bulk silicon comb-drive actuator with low-voltage and large-displacement

E-ISSN： 2261-236x|54|issue|12003-12003

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.54, Iss.issue, 2016-04, pp. : 12003-12003

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Arc behavior in low-voltage arc chambers

By Mutzke A. Rüther T. Lindmayer M. Kurrat M.

EPJ Applied Physics (The), Vol. 49, Iss. 2, 2010-02 ,pp. : 22910-22910

Edp Sciences

Access to resources Recommend Favorite

Modeling and Analysis of a Low-Voltage DC Distribution System

By Han Joon Oh Yun-Sik Gwon Gi-Hyeon Kim Doo-Ung Noh Chul-Ho Jung Tack-Hyun Lee Soon-Jeong Kim Chul-Hwan

Resources, Vol. 4, Iss. 3, 2015-09 ,pp. : 713-735

MDPI

Access to resources Recommend Favorite

Low temperature drive-in of surface-deposited copper in silicon wafers

By Polignano M. L. Caputo D. Carpanese C. Salvà G. Vanzetti L.

EPJ Applied Physics (The), Vol. 27, Iss. 1-3, 2010-03 ,pp. : 435-438

Edp Sciences

Access to resources Recommend Favorite

Planar slow-wave structures for miniaturized low-voltage Cherenkov devices

By Ryskin N.M.

EPJ Web of Conference, Vol. 149, Iss. issue, 2017-08 ,pp. : 04027-04027

Edp Sciences

Access to resources Recommend Favorite

Progress in the development of low-voltage gyrotron for integration with NMR spectrometer

By Bratman V.L.

EPJ Web of Conference, Vol. 149, Iss. issue, 2017-08 ,pp. : 04039-04039

Edp Sciences

Access to resources Recommend Favorite