Influence of hydrogen partial pressure on growth and properties of nanocrystalline SiC by magnetron sputtering

Author： Madani M.   Colder H.   Portier X.   Zellama K.   Rizk R.   Bouchriha H.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|36|1|17-23

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.36, Iss.1, 2006-10, pp. : 17-23

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