Low-temperature deposition of weakly-stressed nanocrystalline silicon films by reactive magnetron sputtering

Author: Ben Othman A.   Leconte Y.   Marie P.   Zellama K.   Goncalves C.   Portier X.   Daouahi M.   Bouchriha H.   Rizk R.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|29|1|33-38

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.29, Iss.1, 2004-12, pp. : 33-38

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content