Role of hydrogen diffusion on the growth of polymorphous and microcrystalline silicon thin films

Author： Fontcuberta i Morral A. Roca i Cabarrocas P.

E-ISSN： 1286-0050|35|3|165-172

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.35, Iss.3, 2006-09, pp. : 165-172

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