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Comparative determination of the electron temperature in Ar- and N₂-plasmas with electrostatic probes, optical emission spectroscopy OES and energy dispersive mass spectrometry EDMS

Author： Crolly G. Oechsner H.

Publisher： Edp Sciences

E-ISSN： 1286-0050|15|1|49-56

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.15, Iss.1, 2010-03, pp. : 49-56

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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