Diagnostic of 13.56 MHz RF sustained Ar–N2 plasma by optical emission spectroscopy

Author: Khan F. U.   Rehman N. U.   Naseer S.   Naveed M. A.   Qayyum A.   Khattak N. A.D.   Zakaullah M.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|45|1|11002-11002

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.45, Iss.1, 2009-01, pp. : 11002-11002

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