Time and spatial resolved optical and electrical characteristics of continuous and time modulated RF plasmas in contact with conductive and dielectric substrates

Author： Hofmann Sven   van Gils Koen   van der Linden Steven   Iseni Sylvain   Bruggeman Peter  

Publisher： Springer Publishing Company

ISSN： 1434-6060

Source： The European Physical Journal D - Atomic, Molecular and Optical Physics, Vol.68, Iss.3, 2014-03, pp. : 1-14

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