Fabrication of nano-structures on glass substrate by modified nano-imprint patterning with a plasma-induced surface-oxidized Cr mask

Author: Lee So   Lee Su   Lee Seong   Lee Heon   Lee Hee  

Publisher: Springer Publishing Company

ISSN: 1738-8090

Source: Electronic Materials Letters, Vol.10, Iss.2, 2014-03, pp. : 351-355

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